Blazed grating fabrication through gray-scale Xray lithography.
نویسندگان
چکیده
Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbitrary shape.
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ورودعنوان ژورنال:
- Optics express
دوره 11 3 شماره
صفحات -
تاریخ انتشار 2003